Scanning tunneling/scanning electron microscope Jeol JSPM-4500S – „Schmetterling“

The JSPM-4500S from Jeol offers the possibility to prepare and investigate the sample surface by multiple surface probe techniques under ultra-high vacuum (UHV) and consists of three different chambers separated by gate valves.

The measurement chamber is equipped with a scanning tunneling microscope (STM), a scanning electron microscope (SEM), an x-ray source an a hemispherical analyzer for x-ray photoelectron spectroscopy (XPS). The combination of the SEM and the electron energy analyzer can also be used for scanning Auger microscopy (SAM). The sample temperature can be varied from 50 K to 870 K using a cryostat and indirect sample heating.

The load-lock chamber is only for transferring the sample from atmosphere to UHV, without breaking the vacuum of the main chambers. The preparation chamber contains a manipulator which can be used for transferring the sample to different positions. The installed sputter gun can produce energetic ions to bombard the surface to remove surface contaminations. In order to remove these surface contaminations, several sputtering and annealing cycles are applied. The chamber is also equipped with a Low Energy Electron Diffraction (LEED) system to investigate the surface ordering, a quadrupole mass spectrometer (QMS) to check the cleanliness of the residual gas and a gas dosing system for adsorption experiments


Fig. 1: Front view of the Jeol JSPM 4500S