step heater

step heater

The step heater is a development of the Chair for MEMS Materials. With the step heater, it is possible to produce material libraries covering up to six distinct deposition temperatures. Here, temperatures up to 1000 °C are possible. Orthogonal to the temperature steps a composition gradient may also be used. The step heater was originally designed for combinatorial development of extended structure zone diagrams, but can be used anywhere where the influence of heat treatment is to be examined.