Dr.-Ing. Alexander Siegel.

Dr.-Ing. Alexander Siegel

Chair of MEMS materials
Institute of materials
Faculty of Mechanical Engineering
Ruhr-Universität Bochum
Universitätsstr. 150
D-44801 Bochum

Building IAN, Floor 01, Room 24

Tel.: 0234-32-29858
Fax: 0234-32-14348


Research Area

Alexander Siegel studied Lasertechnology at the university of applied sciences in Koblenz, located in Remagen, from 2001 to 2006. He received his diploma at the Institute for Analytical Sciences (ISAS) in Dortmund. In his diploma thesis he examined "femtosecond laserablation in optical nearfields". Proceeding Mr. Siegel studied applied physics from 2006 to 2009 and wrote his master thesis “development of an optical method for the in-situ investigation of stresses in thin-films” under the guidance of Prof. Ludwig at the chair for MEMS materials at Ruhr-University Bochum. Afterwards he worked as a research assistant and later on as a PhD student at Prof. Ludwigs group. During the PhD program, which he finished 2015, his work was focused on the combinatorial fabrication and high-throughput-characterization of Ta-Nb-X multilayered thin films. At the moment he continues his research on the investigation of reactive Ru-Al-X multilayer-thin-films as part of a DFG program. Additionally he is responsible for the investigation of special functional properties in specific materials systems in cooperation with industrial partners.


H. Stein, R. Gutkowski, A. Siegel, W. Schuhmann, A. Ludwig (2016)
New materials for the light-induced hydrogen evolution reaction
from the Cu-Si-Ti-O system

Journal of Materials Chemistry A, Vol. 4, Issue 8, 3148-3152
DOI: 10.1039/C5TA10186G

S. Kauffmann-Weiss, S. Hamann, L. Reichel, A. Siegel, V. Alexandrakis,
R. Heller, L. Schultz, A. Ludwig, S. Fähler (2014)
The Bain library: A Cu-Au buffer template for a continuous variation of
lattice parameters in epitaxial films

APL Materials, Vol. 2,Issue 4, 46107
DOI: 10.1063/1.4870759

D. König, K. Richter, A. Siegel, A.-V. Mudring, A. Ludwig (2014)
High-throughput Fabrication of Au-Cu Nanoparticle Libraries
by Combinatorial Sputtering in Ionic Liquids

Advanced Functional Materials, Vol. 24, Issue 14, 2049-2056
DOI: 10.1002/adfm.201303140

D. Grochla, A. Siegel, S. Hamann, P. J. S. Buenconsejo,
M. Kieschnick, H. Brunken, D. König, A. Ludwig (2013)
Time- and space-resolved high-throughput characterization
of stresses during sputtering and thermal processing
of Al-Cr-N thin films

Journal of Physics D: Applied Physics, Vol. 46, No. 8, 084011
DOI: 10.1088/0022-3727/46/8/084011

P.J.S. Buenconsejo, A. Siegel, A. Savan, S. Thienhaus, A. Ludwig (2012)
Preparation of 24 ternary thin film materials libraries on a single substrate
in one experiment for irreversible high-throughput studies

ACS Combinatorial Science, Vol. 14, 25-30
DOI: 10.1021/co2001263

S. Burger, C. Eberl, A. Siegel, A. Ludwig, O. Kraft (2011)
A Novel High-Throughput Fatigue Testing Method for Metallic Thin Films
Science and Technology of Advanced Materials, Vol. 12, No. 5
DOI: 10.1088/1468-6996/12/5/054202