Silicon

Element 13: Silicon, Metalloid



Silicon is used at the Chair for MEMS Materials for:

- substrate materials for thinfilm technologies
- base material for MEMS


Properties

Atomic mass 28,0855 u
Density 2,33 g/cm3
Melting point 1683 K
 Boiling point 2628 K
Specific thermal capacity 703 J/(kg · K)
Heat conductance 150 W/(m · K)