Oxygen

Element 8: Oxygen, Nonmetal



Oxygen is used at the Chair for MEMS Materials for:

- oxides
- sputter gas for reactive sputtering of oxides


Properties

Atomic mass 15,9994 u
Density 1,429 kg · m−3
Melting point 54,8 K
 Boiling point 90,2 K
Specific thermal capacity 920 J/(kg · K)
Heat conductance 0,02658 W/(m · K)