interactive Periodic Table


The highlighted elements are used at the chair of MEMS materials. In most cases elemental targets are used for the synthesis of thin film combinatorial materials libraries by sputter deposition. The gaseous elements Ar, N, O are used as sputter gases. In special cases we are also using alloy targets.



1

H

  

2

He

3

Li

4

Be

  

5

B

6

C

7

N

8

O

9

F

10

Ne

11

Na

12

Mg

  

13

Al

14

Si

15

P

16

S

17

Cl

18

Ar

 19 

K

20

Ca

21

Sc

22

Ti

23

V

24

Cr

25

Mn

26

Fe

27

Co

28

Ni

29

Cu

30

Zn

31

Ga

32

Ge

33

As

34

Se

35

Br

36

Kr

 37 

Rb

 38 

Sr

 39 

Y

 40 

Zr

 41 

Nb

 42 

Mo

 43 

Tc

 44 

Ru

 45 

Rh

 46 

Pd

 47 

Ag

 48 

Cd

 49 

In

 50 

Sn

 51 

Sb

 52 

Te

 53 

I

 54 

Xe

55

Cs

56

Ba

      

72

Hf

73

Ta

74

W

75

Re

76

Os

77

Ir

78

Pt

79

Au

80

Hg

81

Tl

82

Pb

83

Bi

84

Po

85

At

86

Rn

87

Fr

88

Ra

      

104

Rf

105

Db

106

Sg

107

Bh

108

Hs

109

Mt

110

Ds

111

Rg

112

Cn

113

Uut

114

Uuq

115

Uup

116

Uuh

117

Uus

118

Uuo

 

Lanthanoide

 57 

La

 58 

Ce

 59 

Pr

 60 

Nd

 61 

Pm

 62 

Sm

 63 

Eu

 64 

Gd

 65 

Tb

 66 

Dy

 67 

Ho

 68 

Er

 69 

Tm

 70 

Yb

 71 

Lu

Actinoide

89

Ac

90

Th

91

Pa

92

U

93

Np

94

Pu

95

Am

96

Cm

97

Bk

98

Cf

99

Es

100

Fm

101

Md

102

No

103

Lr