At the Department of Materials in Microtechnology (head: Prof. Dr.-Ing Alfred Ludwig) new multifunctional materials, i.a. for miniaturized technical products, are developed with the methods of combinatorial materials research. For this purpose, material libraries are produced with special coating processes and characterized by automated high- throughput methods. The information obtained is visualized in the form of composition processing structure function diagrams (functional phase diagrams).

Among the most important research topics are i.a. Layer systems for microsystems technology (ferromagnetic layers, shape memory layers) and materials for the energy systems of the future (nanostructured semiconductor layers for the solar production of hydrogen, thin-film battery materials, thermoelectrics). Furthermore, the use of microsystems for materials research is the subject of research, as well as the transfer of results of layer screening to volume materials.