MEMS Materials

INFO: We have moved. The offices are now located in building ICFO level 03.
The IAN labs were not affected.



The chair for MEMS materials (Chairholder: Prof. Dr.-Ing. Alfred Ludwig) develop new multifunctional materials for miniaturized technical products with the methods of combinatorial materials research. For this, material libraries are produced with special thin-film deposition processes and characterized by automated high-throughput methods. The results are resumed in the form of composition-structure-function graphs. The most important research topics are thin-film systems for microsystem technology (ferromagnetic layers, shape memory films) and materials for energy storage. Furthermore, the use of micro systems for materials research is subject of the research and the transfer of the results of the thin film screenings to volume materials.




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Welcome to the Chair for MEMS Materials

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Periodensystem2

Periodic Table

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