Ultra-high vacuum combinatorial magnetron sputter system

DCA Sputteranlage

Ultra-high vacuum combinatorial magnetron sputter system for the fabrication of binary, ternary and quaternary thin film material libraries using multilayer thin films.

Combinatorial thin film deposition (K3)

Kombinatorische Dünnschichtabscheidung (K3)

K3 is a turbopumped HV chamber with 3 confocal cathodes (1x each DC, RF, bipolar pulsed DC). This chamber is designed for depositing films of oxides and nitrides, and has a heater capable of going to 850°C in oxyxgen or nitrogen environments, as well as RF bias on the substrate.

High-Throughput cantilever test stand


(a) Setup for characterization of thin film stresses as a function of temperature (σ(T)), (b) measurement principle:
the deflection of each cantilever is detected by a laser beam (parallel line optics) reflected from the free ends of
the cantilevers onto a screen and captured by a camera (enhanced online).

High throughput test stand (HTTS)

Hochdurchsatzprüfstand (HTTS)

The high throughput test stand (HTTS) is a custom made unit, specially designed for the rapid characterization of thin film materials libraries which in our case are commonly deposited on 4” Si-wafers. Depending on the installed measurement module, electrical or magnetical properties of the materials library can be measured.

X-ray diffraction measurement setup


The PANalytical X’Pert PRO X-ray diffraction system is used for the high-throughput characterization of material libraries. Phase analysis of thin films and bulk samples can be performed, as well as reflectometry of thin layers and analysis of residual stresses. The system is equipped with a PiXcel detector that permits the acquisition of diffraction patterns in short times. Also, the phase analysis of batches of samples is possible. The analysis of small spots can be performed via using a microcapillary having 800 µm in diameter.



The cleanroom at the Chair for MEMS Materials is class ISO 5, and includes tools for photolithography and further microstructuring.

From atoms to turbine blades a scale bridging journey into the nanocosmos of a Ni-base superalloy

DFB Projekt: SFB-Transregio 103

The movie represents a scale bridging journey from the macro scale into the nanocosmos of a superalloy turbine blade. Turbine blades are produced by a directional solidification process. They are used in gas turbines for aero engines and for power plants where they must withstand high mechanical loads at extremely high temperatures. The high temperature strength depends on the microstructure of the superalloy. There are microstructural features on different length scales, which determine the properties of these fascinating materials. In the movie different microscopic methods are used to zoom into a turbine blade. We first see a turbine blade. As we approach we recognize dendrites which form during solidification (length scale 0,5 milli meter). We zoom in and further and recognize the well known gamma/gamma prime microstructure (length scale: 0,5 micro meter). We use advanced analytical methods to show how the alloy elements are distributed in the microstructure. Finally, we resolve columns of atoms (length scale 0,5 nano meter) which allow us to appreciate the crystalline nature of superalloys. The movie was produced by the Insitute for Materials of the Ruhr-Universität Bochum in the framework of the collaborative research center SFB/TR 103 on single crystal super alloys, which is funded by the Deutsche Forschungsgemeinschaft (DFG).

Institut für Werkstoffe - DFB Projekt: SFB-Transregio 103

From the cicada to the implant - Bionically inspired materials research


The Chair for MEMS Materials is represented at the medical technology fair Compamed: "Infection protection has many facets." Antibacterial metals have been part of this for some years, but a more recent development is nanostructured surfaces that kill bacteria. "In our video, Prof. Manfred Köller from the Berufsgenossenschaftliche Universitätsklinikum Bergmannsheil, how nano-pillars destroy bacteria, and we ask Prof. Alfred Ludwig of the Ruhr-Universität Bochum how he lets the pillars in his laboratory grow on titanium plates and what the wings of the cicada have to do with them. " Source: COMPAMED.de