Combinatorial thin film deposition

Sputteranlage
Lupe

The Chair Materials Discovery and Interfaces has specialized in applying the combinatorial technique to make and screen novel materials systems. Therefore, thin films are deposited by physical vapor deposition (PVD). There are currently 3 PVD chambers available, all designed to handle 100mm (4") silicon wafer substrates.

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High vacuum chamber

Hochvakuumkammer
Lupe

K4 is a high vacuum chamber, turbo- and cryo-pumped, equipped with three cathodes (1x DC, 2x RF).

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High vacuum magnetron sputtering system

Sputterkammer 5
Lupe

K5 is a high vacuum magnetron sputtering system (Creavac GmbH, Germany) equipped with two "cathodes and one 4" cathode.

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Step heater

Step Heater
Lupe

The step heater is an in-house development of the Department of Materials in Microtechnology. With the step heater, it is possible to produce time-saving material libraries that cover up to six different deposition temperatures.

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Clean room

Clean room
Lupe

The clean room at the Department of Materials in Microtechnology complies with the ISO 5 standard and includes photolithographic and other systems for microstructuring.

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Cantilever test stand

Cantilever test stand
Lupe

The picture on the left shows a vacuum high-throughput test stand for the characterization of the actuator response of thin film SMA (including hot/cold plate, liquid nitrogen (LN2) and electrical feeds).


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Physical Property Measurement System (PPMS) mit VSM Option

Physical Property Measurement System (PPMS)
Lupe

Das Physical Property Measurement System (PPMS) von Quantum Design erlaubt eine hochauflösende Erfassung von verschiedenen Funktionseigenschaften. Das PPMS kann unter anderem dazu genutzt werden, elektrische Eigenschaften, Wärmekapazitäten und magnetische Eigenschaften zu messen.

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GERO tube furnace

Gero tube furnace
Lupe

The Gero tube furnace enables heat treatments under permanent Ar or N2 flow at temperatures of up to 1200 ° C.

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High-throughput test stand (HTTS)

High throughput test stand (HTTS)
Lupe

The high-throughput test stand (HTTS) is a custom made unit, specially designed for the rapid characterization of thin film materials libraries which in our case are commonly deposited on 4” Si-Wafers.

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Scanning electron microscopy & energy dispersive X-Ray spectroscopy

Scanning electron microscopy & energy dispersive X-ray spectroscopy
Lupe

The JEOL 5800 SEM is a sophisticated scanning electron microscope that was designed to operate in either high or low vacuum mode.

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Tactile surface profilometer

Tactile surface profilometer
Lupe

The Surface Profilometer (XP2, Ambios Technology) is used to characterize the film thickness of thin-film material libraries.

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Digital Holography Interferometry cantilever test stand

Digital Holography Interferometry cantilever test stand
Lupe

The micro cantilever test stand developed by the chair offers the possibility to determine the radii of curvature of micro cantilevers.

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Versatile annealing chamber

Versatile annealing chamber
Lupe

This specially developed annealing chamber offers the possibility to carry out simultaneous resistance measurements on several samples at varying temperatures (up to 600 ° C). It can be worked in a vacuum or in inert gas atmospheres.

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X-Ray diffraction

X-ray diffraction
Lupe

The PANalytical X’Pert PRO X-Ray diffraction system is used for the high-throughput characterization of material libraries.

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