Dr.-Ing. Dario Grochla

Dr.-Ing. Dario Grochla

Chair of MEMS materials
Institute of materials
Faculty of Mechanical Engineering
Ruhr-Universität Bochum
Universitätsstr. 150
D-44801 Bochum

Building IC, Floor 03, Room 213

Tel.: 0234-32-25596
Fax: 0234-32-14348


Research Area

Development of a MEMS-based measuring system for parallel in situ measurement of stress, temperature and electrical resistance during sputtering deposition processes

D. Grochla studied Mechanical Engineering with focus on Micro-Engineering at the Ruhr-Universität Bochum. He earned his diploma under the direction of Prof. Dr.-Ing. A. Ludwig. In the course of his diploma thesis, D. Grochla developed a method to synthesize complete ternary thinfilm material libraries in a single deposition process by use of PVD-Codeposition.
Currently D. Grochla is working towards his PhD degree in Professor Ludwig’s group at the Chair of MEMS materials at Ruhr-Universität Bochum. His research area concentrates on investigation and development of suitable MEMS-based measuring system with focus on parallel in situ measurement of time-resolved stress, temperature and the electrical resistance of the growing thin film during the deposition process. This new measurement technique should be usable universally in static and dynamic sputter configurations (also for industrial applications) using a rotating substrate holder, as well as for processes in CVD-reactors. This novel diagnostic approach will give a deeper insight in thin film growth, thus a better control of the deposition process will be ensured. This project is part of the SFB-TR 87 ”Pulsed high power plasmas for the synthesis of nanostructured functional layers” and takes place in close interdisciplinary cooperation with different research groups of Ruhr-Universität Bochum and RWTH Aachen.


H. Bahre, H. Behm, D. Grochla, M. Böke, R. Dahlmann, C. Hopmann, A. Ludwig, J. Winter (2015)
Film stress of amorphous hydrogenated carbon on biaxially oriented polyethylene terephthalate
Plasma Processes and Polymers, Vol. 12, 896-904
DOI: 10.1002/ppap.201500045

H. Stein, D. Naujoks, D. Grochla, C. Khare, R. Gutkowski, S. Grützke, W.Schuhmann, A. Ludwig (2015)
A structure zone diagram obtained by simultaneous deposition on a novel step heater: a case study for Cu2O thin films
Physica Status Solidi
DOI: 10.1002/pssa.201532384

N. Bagcivan, K. Bobzin, A. Ludwig, D. Grochla, R. H. Brugnara (2014),
CrN/AlN Nanolaminate Coatings Deposited via High Power Pulsed and Middle Frequency Pulsed Magnetron Sputtering,
Thin Solid Films, Vol. 572, 153-160, DOI: 10.1016/j.tsf.2014.06.058

Grochla D., Siegel A., Hamann S., Buenconsejo P.J.S. Kieschnick M., Brunken H., König D. and Ludwig A. (2013),
Time and space resolved high-throughput characterization of stresses during sputtering and thermal processing of Al-Cr-N thin films
J. Phys. D: Appl. Phys. 46 (2013) 084011.

D. König, P.J.S. Buenconsejo, D. Grochla, S. Hamann, J. Pfetzing-Micklich, A. Ludwig (2012)
Thickness-dependence of the B2–B19 martensitic transformation in nanoscale shape memory alloy thin films: Zero-hysteresis in 75 nm thick Ti51Ni38Cu11 thin films
Acta Materialia 60, 306-313.

H. Brunken, D. Grochla, A. Savan, M. Kieschnick, J. D. Meijer, A. Ludwig (2011)
Combinatorial investigation of Fe–B thin-film nanocomposites
Sci. Technol. Adv. Mater. 12.