Nitrogen

Element 7: Nitrogen, Nonmetal



Nitrogen is used at the Chair for MEMS Materials for:

- Nitrides
- sputter gas for reactive sputtering of nitrides


Properties

Atomic mass 14,0067 u
Density 1,250 kg/m3
Melting point 63,05 K
Boiling point 77,36 K
Specific thermal capacity 1040 J/(kg · K)
Heat conductance 0,02583 W/(m · K)