Scanning electron microscopy & energy dispersive X-ray spectroscopy

Scanning electron microscopy & energy dispersive X-ray spectroscopy

The JEOL 5800 SEM is a sophisticated scanning electron microscope that was designed to operate in either high or low vacuum mode. The microscope is controlled by an internal computer through a menu-driven software interface. The motorized stage (-62.5 mm < X < 62.5 mm, -50 mm < Y < 50 mm, 48mm < Z < 7 mm, -10° < Tilt < 90° and Rotate 360° endless) is operated from a joy stick, and the single joystick serves several functions which are set by buttons on the keyboard.
The instrument's computer can also receive instructions and be controlled by other independent computers through RS232 and SCSI ports. The chamber allows scanning over the total area of 4 inch wafers. The maximum loadable wafer size is 8 inch. The SEM is equipped with detectors for imaging of secondary electrons (SE), backscattered electrons (BSE) and x-rays. The SE detector is a highly efficient Everhart-Thornly detector for imaging at all scan rates in high vacuum. The Everhart-Thornly detector cannot be used in the low vacuum mode, and its function is replaced by the BSE detector.

This detector consists of an annular ring mounted under the objective lens and another flat detector a short distance from the lens, creating a parallax from which topographic information is derived in the low vacuum mode.
The Oxford analytical system consists of the EDX detector (Inca X-act) and two interface boxes (X-stream and Mics) and a standard pc. The EDX has an ultra-thin polymere window (d = 200nm) installed and can therefore detect elements from B to U. The detector is controlled from the Oxford interface, which contains the electronic hardware for the EDX signal and image acquisition, along with microscope automation hardware. The interface passes information to and receives commands from the user through the Oxford software on the PC computer. Image and EDx acquisition is accomplished through Oxford Windows software. The software is modular in design, and many of the available modules have been installed. There are four primary modules: Analyzer, Point & ID, Mapping and Automation. Qualitative x-ray identification, quantitative analysis, and x-ray mapping are available through the Analyzer module. The EDX can be utilized in both vacuum modes, but requires a working distance of approximately 10 mm (+/- 1 mm).