Cameca SX50 (no longer available)

Our lab was previously equipped with a Cameca 'SX50' electron microprobe. Although no longer available, we list below the technical specifications of our legacy instrument.

Cameca SX50 RUB

  • Manufacturer: Cameca

  • Model: SX50

  • Electron gun:
    • Electron source: W filament

    • Max.acceleration voltage: 30 kV

    • Max. beam current: 10 μA

  • Detectors
    • Backscatter electron detector

    • Secondary electron detector

    • Cathodoluminescence detector

    • EDX detector(Lithium-drifted Silicon detector)

  • Four wavelength-dispersive spectrometers (WDS)

    • WD spectrometer 1:

      • 16cm Rowland circle

      • low-pressure Ar-gas flow proportional counter

      • TAP, PET

    • WD spectrometer 2:

      • 16cm Rowland circle

      • low-pressure Ar-gas flow proportional counter

      • LiF, TAP, PC0, PC1

    • WD spectrometer 3:

      • 16cm Rowland circle

      • high-pressure Ar-gas flow proportional counter

      • LiF, PET

    • WD spectrometer 4:

      • 16cm Rowland circle

      • low-pressure Ar-gas flow proportional counter

      • PET, TAP, PC2, PC3

    • Vacuum system
      • Two Pfeiffer rotary vane pumps

      • Oil diffusion pump

      • Ion getter pump

    • Additional features
      • Optical microscope with camera (reflected and transmitted light)

      • Autofocus system

      • Beam stabilizer