Group Devi - Chemistry of Inorganic Materials

Welcome to the Devi-Group (Inorganic Materials Chemistry)


ALD2017: A great conference with great people

From 16. - 18. July 2017, the AVS ALD2017 conference took place in Denver, CO, USA and our group was represented with two talks. In addition, Lukas Mai was among the "Best ALD 2017 Student Paper Award Finalists" and he won a well recognized prize, granted by Lam Research; Congratulations!


29. June 2017: We're pleased to have Maarit Karppinen, who is a Visiting International Professor (VIP) at RUB, at our labs and at our faculty.



From 11 - 14 June 2017, our whole group spend a wonderful time at the Joint EuroCVD 21 & Baltic ALD 15 Conference in Linköping, Sweden. Congrats to our PhD student Richard O'Donoghue who was awarded the "Best Poster" award!



Having a nice get-together with the whole group after a successful week




SFB-TR 87

Sonderforschungsbereich-Transregio 87



Gepulste Hochleistungsplasmen zur Synthese nanostrukurierter Funktionsschichten

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COST: CELINA

European Cooperation in Science and Technology


Chemistry for ELectron-Induced NAnofabrication

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Highlights

Hafniumoxid bringt den Durchbruch AG der RUB entwickelt neuartige Verbindung Preis im Erfinderwettbewerb

Dem Wunsch der Computerindustrie nach immer kleineren Transistoren steht die Wirklichkeit des Isoliermaterials gegenüber: Seit über 45 Jahren isoliert die Halbleiterindustrie Transistoren mit einer Dünnschicht nicht leitendem (dielektrischem) Siliziumdioxid (SiO2), bei dessen minimal möglicher Schichtdicke von rund 1,4 nm allerdings Leckströme auftreten können. Alternativen zu SiO2 fehlten.

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